M00012516
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Surface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials
British Standards Institution
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Availability date: 11/04/2021
This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material.
Published | |
Document Type | Standard |
Status | Current |
Publisher | British Standards Institution |
Pages | |
ISBN | |
Committee | CII/60 |