M00030264
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International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
International Electrotechnical Committee
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Availability date: 11/05/2021
This part of IEC 60050 gives the general terminology used for micro-electromechanical devices including the process of production of such devices.
Published | |
Document Type | Standard |
Status | Current |
Publisher | International Electrotechnical Committee |
Pages | |
ISBN | |
Committee | TC 1 |