Table of Contents

FOREWORD
1 Scope
2 Normative references
3 Terms and symbols
4 Test piece
5 Test principle and test apparatus
6 Test report
Annex A (informative) - Electromechanical relaxation
        test example of freestanding Au film

Abstract

Describes a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47