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ISO 13084:2018
M00021692
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ISO 13084:2018
Surface chemical analysis Secondary ion mass spectrometry Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
International Organization for Standardization
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Abstract
This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes.
General Product Information
| Document Type | Standard |
| Status | Current |
| Publisher | International Organization for Standardization |
| Committee | TC 201 |
| Supersedes |
|